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Thesis Details
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TITLE
CERTIFICATE
DEDICATION
DECLARATION
ACKNOWLEDGEMENT
PREFACE
CONTENTS
I. A BRIEF REVIEW OF THE ELECTRICAL, OPTICAL AND STRUCTURAL PROPERTIES OF INDIUM OXIDE, TIN OXIDE AND INDIUM TIN OXIDE THIN FILMS
1.1 Introduction
1.2 Transparent Conductors
1.3 Earlier Studies on Indium Oxide
1.4 Earlier Studies on Tin Oxide
1.5 Earlier Studies an Indium Tin Oxide
References
II. APPARATUS AND EXPERIMENTAL TECHNIQUES USED IN THE PRESENT STUDY
2.1 Introduction
2.2 Method of Preparation
2.3 Resistive Heating Evaporation
2.4 Electron Beam Gun Evaporation
Fig. 2.1 Schematic diagram of an electron beam gun.
2.5 Production of Vacuum
2.6 Oil Sealed Rotary Pump
Fig. 2.2 Cross-section of oil-sealed rotary pump.
2.7 Diffusion Pump
Fig. 2.3 Schematic diagram of cross-section of a diffusionP-P -
2.8 Vacuum Coating Plant
Plate 2.1 Photograph of the thin film vacuum coating unit Used in the laboratory.
2.9 Substrate Cleaning
2.10 Substrate Heater and Temperature Measurement
Fig. 2.4 Schematic diagram of a vacuum coating unit.
Fig. 2.5 Schemat.ic diagram of the substrate heater usedin the laboratory.
2.11 Preparation of Films
2.12 Sample Annealing
Fig.2.6 Block diagram of the temperature controller cum recorder
2.13 Measurement of Thickness of Film
2.14 Optical Method (Multiple Beam Interferometry)
2.15 Tolanskys Fizeau Fringes Method
2.16 Quartz Crystal Thickness Monitor
Fig. 2.7 Arrangement and figure pattern of Fizeaufringes.
Fig.2.8 Block diagram of a quartz crystal thickness monitor
2.17 Measurement of Electrical Conductivity
Fig. 2. 9 Schematic diagram of electrical conductivitymeasurements. All dimensions are in mm.
2.18 Conductivity Cell
Fig. 2.10 Schematic diagram of the cross-section of theconductivity cell.
2.19 Electrometer
2.20 UV-Visible Spectrophotometer
Fig. 2.11 Measurement of resistance using Keithleyprogrammable electrometer (Model No.617) in V/I mode.
2.21 X-ray diffractometer
Fig. 2.12 Optical diagram of the spectrophotometer (Shimadzu W 160 A)
Fig. 2.13 Block diagram of the electrical system of thespectrophotometer (Shimadzu W 160 A)
References
III. ELECTRICAL PROPERTIES OF INDIUM OXIDE, TIN OXIDE AND INDIUM TIN OXIDE THIN FILMS
3.1 Introduction
3.2 Theory
3.3 Indium Oxide
3.3.1 Experiment
3.3.2 Results and Discussion for Indium Oxide
3.4 Tin Oxide
3.4.1 Experiment
3.4.2 Results and Discussion for Tin Oxide
3.5 Indium Tin Oxide (ITO)
3.5.1 Experiment
3.5.2 Results and Discussion for Indium Tin Oxide
F i g. 3.27 Schematic energy band model for ITO.
Fig. 3 28 Schematic density of states diagram for a semiconductor dopedto various extents.
References
IV. OPTICAL STUDIES IN INDIUM OXIDE, TIN OXIDE AND INDIUM TIN OXIDE (ITO) THIN FILMS
4.1 Introduction
4.2 General Theory
Fig. 4.1 Reflection and transmission of light by a singlefilm.
4.3 Determination of Energy Band Gap Indium Oxide
Fig. 4.3 Direct transition from the valence band to theconduction band.
4.4 Indium Oxide
Fig. 4.4 Indirect transition from the valence band to theconduction band.
Fig. 4.5 Illustration of Burstein-Moss shift.
44.1 Results and Discussion for Indium Oxide Films
4.5 Tin Oxide
4.5.1 Results and Discussion for Tin Oxide Films
4.6 Indium Tin Oxide
4.6.1 Results and Discussion for ITO Films
References
V. XRD STUDIES ON INDIUM OXIDE, TIN OXIDE AND INDIUM TIN OXIDE THIN FILMS
5. 1 Introduction
5. 2 Indium Oxide
5. 3 Tin Oxide
5. 4 Indium Tin Oxide
References
SUMMARY